Support Tube
Support tubes are mostly used in semiconductor deposition cavities, mainly responsible for supporting and positioning wafers or quartz rings to ensure the stability of the process structure. Support tubes are prone to cracking and chipping during thin-walled or long cylindrical processing. Good dimensional control must be maintained during processing, and roundness, perpendicularity and concentricity must be kept highly accurate.
High-precision cylindrical forming capability
Precision hole and end face machining capability
High-cleanliness treatment, meeting advanced process requirements