Quartz Ring Series
Quartz rings are widely used in the etching and deposition chambers of semiconductors. They are installed at the edge of the wafer to avoid over-processing and make the plasma reaction more uniform. Quartz rings often contain multiple contours, chamfers and detailed grooves. If the processing control is not precise, it will directly affect the reaction uniformity and process results. Therefore, strict dimensional and surface quality standards must be met.
Complex contour forming capability
Surface grinding and polishing quality control