Wafer Boat
Wafer boats are critical components for carrying and positioning wafers during high-temperature furnace processes, including thermal treatment, oxidation, diffusion, and thin-film deposition. They ensure precise wafer spacing to maintain uniform airflow and temperature distribution, preventing thermal stress and contamination to optimize yield.
Uniform slot depth and planar alignment ensure consistent wafer positioning. High cleanliness and exceptional repeatability meet the stringent requirements of advanced semiconductor fabrication.